The experiments show that the AFM system based on plat scanner has many advantages of good image contrast and definition even in a large scanning range, and has a universal application with good scanning stability and repeatability. 实验表明,基于平板扫描器的AFM具有大范围均匀扫描下良好的图像对比度和清晰度,具有应用的广泛性,扫描的稳定性和重复性。